Uploader: Stanley
Country: Austria
Uploaded: Jul 06, 2018
Price: Free

Please, verify you are not robot to load rest of pages

download iso 14644-5 pdf

Provläsningsexemplar / Preview
INTERNATIONAL
STANDARD
ISO
14644-5
First edition
2004-08-15
Cleanrooms and associated controlled
environments —
Part 5:
Operations
Salles propres et environnements maîtrisés apparentés —
Partie 5: Exploitation
Reference number
ISO 14644-5:2004(E)
© ISO 2004
Provläsningsexemplar / Preview
ISO 14644-5:2004(E)
PDF disclaimer
This PDF file may contain embedded typefaces. In accordance with Adobe's licensing policy, this file may be printed or viewed but
shall not be edited unless the typefaces which are embedded are licensed to and installed on the computer performing the editing. In
downloading this file, parties accept therein the responsibility of not infringing Adobe's licensing policy. The ISO Central Secretariat
accepts no liability in this area.
Adobe is a trademark of Adobe Systems Incorporated.
Details of the software products used to create this PDF file can be found in the General Info relative to the file; the PDF-creation
parameters were optimized for printing. Every care has been taken to ensure that the file is suitable for use by ISO member bodies. In
the unlikely event that a problem relating to it is found, please inform the Central Secretariat at the address given below.
© ISO 2004
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means,
electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below or
ISO's member body in the country of the requester.
ISO copyright office
Case postale 56 • CH-1211 Geneva 20
Tel. + 41 22 749 01 11
Fax + 41 22 749 09 47
E-mail [email protected]
Web www.iso.org
Published in Switzerland
ii
© ISO 2004 – All rights reserved
Provläsningsexemplar / Preview
ISO 14644-5:2004(E)
Contents
Page
Foreword ............................................................................................................................................................ iv
Introduction ........................................................................................................................................................ v
1
Scope...................................................................................................................................................... 1
2
Normative references ........................................................................................................................... 1
3
Terms and definitions........................................................................................................................... 2
4
Specification of requirements ............................................................................................................. 3
Annex A (informative) Operational systems .................................................................................................... 7
Annex B (informative) Cleanroom clothing.................................................................................................... 13
Annex C (informative) Personnel .................................................................................................................... 18
Annex D (informative) Stationary equipment................................................................................................. 22
Annex E (informative) Materials and portable equipment ............................................................................ 26
Annex F (informative) Cleanroom cleaning ................................................................................................... 33
Bibliography ..................................................................................................................................................... 43
© ISO 2004 – All rights reserved
iii
Provläsningsexemplar / Preview
ISO 14644-5:2004(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the
International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 14644-5 was prepared by Technical Committee ISO/TC 209, Cleanrooms and associated controlled
environments.
ISO 14644 consists of the following parts, under the general title Cleanrooms and associated controlled
environments:

Part 1: Classification of air cleanliness

Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1

Part 3: Test methods

Part 4: Design, construction and start-up

Part 5: Operations

Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)

Part 8: Classification of airborne molecular contamination
The following part is under preparation:

iv
Part 6: Terms and definitions